Voltage Source Resonant Inverter for Excimer Gas Discharge Load

Oleg Koudriavtsev; Mutsuo Nakaoka

Voltage Source Resonant Inverter for Excimer Gas Discharge Load

Oleg Koudriavtsev

Mutsuo Nakaoka

Vol. 2, No. 3, pp. 206-211, Jul. 2002

10.6113/JPE.2001.02.3.206

Silent discharge

Pulse density modulation

Zero voltage soft switching commutation

High-frequency inverter

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Abstract

Silent gas discharge method has been widely applied for ozone production, ultraviolet light and UV laser generation. Since ozone and ultraviolet applications have tendency to spread widely in industry, the development of efficient and low-cost power supply for such systems is an important task at present. This paper introduces high-frequency inverter type mode power supply designed for ozone generation tube and ultraviolet generation excimer lamp and considerations on the design of the inverter and pulse density modulation control strategy applied in it.

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Cite this article

[IEEE Style]

O. Koudriavtsev and M. Nakaoka, "Voltage Source Resonant Inverter for Excimer Gas Discharge Load," Journal of Power Electronics, vol. 2, no. 3, pp. 206-211, 2002. DOI: 10.6113/JPE.2001.02.3.206.

[ACM Style]

Oleg Koudriavtsev and Mutsuo Nakaoka. 2002. Voltage Source Resonant Inverter for Excimer Gas Discharge Load. Journal of Power Electronics, 2, 3, (2002), 206-211. DOI: 10.6113/JPE.2001.02.3.206.