Pulse current generator with improved waveform fidelity for high‑voltage capacitively coupled plasma systems
Vol. 20, No. 5, pp. 1316-1327, Sep. 2020
10.1007/s43236-020-00110-x
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Capacitively coupled plasma Current source converter Pulse power generator Plasma power supply Plasma applications
Abstract
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Cite this article
[IEEE Style]
B. Chae, J. Min, Y. Suh, H. Kim, H. Kim, "Pulse current generator with improved waveform fidelity for high‑voltage capacitively coupled plasma systems," Journal of Power Electronics, vol. 20, no. 5, pp. 1316-1327, 2020. DOI: 10.1007/s43236-020-00110-x.
[ACM Style]
Beomseok Chae, Juhwa Min, Yongsug Suh, Hyejin Kim, and Hyunbae Kim. 2020. Pulse current generator with improved waveform fidelity for high‑voltage capacitively coupled plasma systems. Journal of Power Electronics, 20, 5, (2020), 1316-1327. DOI: 10.1007/s43236-020-00110-x.