Electrical variable capacitor using symmetrical switch configuration for reducing switch voltage in RF plasma systems
Vol. 20, No. 6, pp. 1562-1572, Nov. 2020
10.1007/s43236-020-00129-0
Abstract
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Cite this article
[IEEE Style]
J. Min, B. Chae, Y. Suh, J. Kim, H. Kim, "Electrical variable capacitor using symmetrical switch configuration for reducing switch voltage in RF plasma systems," Journal of Power Electronics, vol. 20, no. 6, pp. 1562-1572, 2020. DOI: 10.1007/s43236-020-00129-0.
[ACM Style]
Juhwa Min, Beomseok Chae, Yongsug Suh, Jinho Kim, and Hyunbae Kim. 2020. Electrical variable capacitor using symmetrical switch configuration for reducing switch voltage in RF plasma systems. Journal of Power Electronics, 20, 6, (2020), 1562-1572. DOI: 10.1007/s43236-020-00129-0.