2‑kW plasma power supply design with small frequency fluctuations


Vol. 23, No. 5, pp. 860-869, May  2023
10.1007/s43236-023-00630-2




 Abstract

This paper proposes a 2-kW plasma power supply with a small frequency fluctuation. In existing plasma power supplies, when the input voltage is fixed, the frequency fluctuation is large according to the load impedance and output voltage of the plasma discharger, which constitutes a problem. The proposed plasma power supply addresses this problem by generating an output voltage with a small frequency fluctuation according to the load impedance and output voltage change by applying a variable input voltage and a compensation capacitor. The proposed circuit has a two-stage structure comprising a single-phase power factor correction (PFC) boost converter and a high-frequency inverter with a parallel resonant circuit. Accordingly, a prototype plasma power supply with an output voltage of 3–5 kVpk and 2-kW was designed, and its validity was verified using experimental results obtained from the proposed circuit.


 Statistics
Show / Hide Statistics

Cumulative Counts from September 30th, 2019
Multiple requests among the same browser session are counted as one view. If you mouse over a chart, the values of data points will be shown.



Cite this article

[IEEE Style]

D. Hong, S. Kong, C. Jeong, J. Kwon, J. Lee, M. Kim, "2‑kW plasma power supply design with small frequency fluctuations," Journal of Power Electronics, vol. 23, no. 5, pp. 860-869, 2023. DOI: 10.1007/s43236-023-00630-2.

[ACM Style]

Dae-Young Hong, So-Jeong Kong, Chang-Gyeo Jeong, Jae-Hyun Kwon, Jun-Young Lee, and Min-Jae Kim. 2023. 2‑kW plasma power supply design with small frequency fluctuations. Journal of Power Electronics, 23, 5, (2023), 860-869. DOI: 10.1007/s43236-023-00630-2.

Smart Search
(in title, author, abstract,keywords)

Advanced Search ▼

Popular Keywords
(top 10 keywords)

Recent Publications
(Last 3 years)









  ISSN : 1598 - 2092
eISSN : 2093 - 4718