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Search: "[ keyword: Plasma power supply ]" (2)
2‑kW plasma power supply design with small frequency fluctuations
Dae-Young Hong So-Jeong Kong Chang-Gyeo Jeong Jae-Hyun Kwon Jun-Young Lee
Min-Jae Kim
Vol. 23, No. 5, pp. 860-869, May 2023
10.1007/s43236-023-00630-2
Min-Jae Kim
Vol. 23, No. 5, pp. 860-869, May 2023
10.1007/s43236-023-00630-2
Pulse current generator with improved waveform fidelity for high‑voltage capacitively coupled plasma systems
Beomseok Chae Juhwa Min Yongsug Suh Hyejin Kim Hyunbae Kim
Vol. 20, No. 5, pp. 1316-1327, Sep. 2020
10.1007/s43236-020-00110-x
Vol. 20, No. 5, pp. 1316-1327, Sep. 2020
10.1007/s43236-020-00110-x
ISSN : 1598 - 2092
eISSN : 2093 - 4718